刘世元教授
电话：027-87559543
邮 箱：shyliu@hust.edu.cn
个人主页：https://pirc.hust.edu.cn
个人简介
刘世元(Liu Shiyuan, Professor)，机械科学与工程学院、光学与电子信息学院、集成电路学院联聘教授，博士生导师；精密测量研究中心主任，集成电路测量装备研究中心主任，先进光刻机技术教育部工程研究中心常务副主任；国家杰出青年科学基金获得者，国家科技创新领军人才；英国物理学会(IOP)会士，中国微米纳米技术学会会士；国际测量与仪器委员会(ICMI)常务委员，国际标准化组织(ISO)技术委员会委员，中国仪器仪表学会集成电路测量与仪器分会主任委员，中国光学学会光刻技术专业委员会副主任委员，中国机械工程学会半导体装备分会副主任委员，中国微米纳米技术学会微纳米测量与仪器分会副主任委员，湖北省仪器仪表学会副理事长。
主要从事计算成像与计算光刻、纳米光学测量技术与仪器、集成电路制造在线测量检测技术与装备等方面的研究工作，致力于光学工程、精密机械、仪器科学、集成电路、光电材料等学科的交叉融合，强调基础研究与产业应用并重。主持国家自然科学基金（7项，包括杰青、重大仪器、重点项目）、科技部首批国家重大科学仪器设备开发专项、国家科技重大专项等20余项，发表SCI论文300余篇，获授权发明专利200余件，牵头获湖北省技术发明一等奖、中国仪器仪表学会技术发明一等奖等科技奖励。研制的仪器、软件、测量装备等多项成果已实现成果转化和产业化，在中芯国际、长江存储、华为、京东方、华星光电等微电子、光电子龙头企业获得批量应用。
精密仪器研究中心主页：https://pirc.hust.edu.cn
荣誉获奖
英国物理学会(IOP)会士
中国微米纳米技术学会会士
国家杰出青年科学基金获得者
国家科技创新领军人才
湖北省自然科学基金创新群体负责人
教育部新世纪优秀人才
华中科技大学十佳青年教工
湖北省技术发明一等奖
中国仪器仪表学会技术发明一等奖
研究方向
1.计算成像理论方法与仪器装备
探索无透镜相干衍射成像、叠层衍射成像等计算成像新范式，重点研究逼近复杂实验场景的时空部分相干成像建模、正则化投影逆向优化求解、跨域优化（非像素域）的多维信息评价体系、成像系统误差溯源、定量相位测量不确定度评估与精度评价方法等内容，研制可见光、EUV、X射线计算成像显微镜等新型仪器装备，突破现有成像系统的时空带宽极限（逼近原子级空间分辨、飞秒级时间分辨），为集成电路制造、原子级制造等先进制造过程中的在线、非破坏、精确量测提供新原理、新方法与新途径。
2.计算测量理论方法与仪器装备
计算测量定义为“对复杂测量过程进行建模计算并通过仪器在一定观测条件下获得观测数据，然后通过逆问题求解以获取待测参数的一种测量技术”，结合人工智能与机器学习等领域的最新进展，重点研究计算测量中的正向传递特性模型快速准确数值计算方法、待测参数鲁棒精确反演提取方法、测量条件配置优化策略、以及测量结果的不确定度评估方法等内容，研制新型椭偏仪、表面形貌仪、光学散射仪、X射线散射仪等仪器装备，为集成电路制造、原子级制造等先进制造过程中的在线、非破坏、精确测量提供新原理、新方法与新途径。
3.计算光刻理论方法与算法软件
发展深紫外(DUV)和极紫外(EUV)光刻部分相干成像理论，重点研究EUV光刻掩模三维效应模型快速精确数值计算方法、光刻胶紧凑模型与快速准确标定方法、光刻光学成像快速计算方法、基于卷积变量分离的矢量光刻成像快速建模求解方法、快速鲁棒的光源掩模逆向设计方法、光刻掩模热点高效检测、曲线掩模的极简表示与高效优化方法等内容，开发光学临近校正(OPC)、光源掩模优化(SMO)、逆光刻技术(ILT)等高效鲁棒算法软件，解决集成电路制造中将芯片设计转化为芯片产品的“卡脖子”技术难题。
开设课程
《工程测试技术基础》（本科生课程）
《微纳测试技术》（研究生课程）
《椭偏测量学导论》（研究生课程）
研究生招生
真诚欢迎勤奋好学、能吃苦、肯动脑筋、有责任心的同学加入，攻读博士学位或硕士学位。希望有意加入的同学具有扎实的数理基础，具有但不局限于数学、物理、光学、仪器、机械、材料、集成电路、人工智能等学科背景，学习和自学能力强，能熟练运用英文进行论文写作与交流，对精密仪器设备研制与应用研究，特别是面向集成电路纳米制造与原子级制造的计算成像、计算测量、计算光刻等基础理论与关键技术研究深有兴趣。希望在这个严谨认真而又宽松和谐的集体里，度过充实而有意义的科研学习时光。
博士后招聘
研究中心希望招聘博士后3名，招聘信息长年有效，有意者请发来个人简历及论文代表作3篇，欢迎加入！
科研项目
1.企业委托项目，偏振像差测量技术，2025-2027，1600万元，在研，主持。
2.企业委托项目，光学元件偏振特性检测技术，2025-2027，1600万元，在研，主持。
3.国家自然科学基金重点项目，EUV光刻掩模缺陷原波长叠层衍射检测理论与方法研究，2022-2026，300万元，在研，主持。
4.企业委托项目，集成电路测量与检测技术，2022-2025，3000万元，已结题，主持。
5.国家自然科学基金重大科研仪器研制项目，高分辨层析成像穆勒矩阵椭偏仪研制与应用基础研究，2018-2022，701万元，已结题（结题优秀），主持。
6.国家科技重大专项子课题，套刻误差光学测量技术研究，2017-2020，742万元，已结题，主持。
7.国家杰出青年科学基金，机械测试理论、方法与技术，2016-2020，400万元，已结题（结题优秀），主持。
8.国家科技重大专项子课题，基于模型的光学临近校正技术研究，2012-2014，135万元，已结题，主持。
9.国家重大科学仪器设备开发专项，宽光谱广义椭偏仪设备开发，2011-2014，3979万元，已结题（首批验收），主持。
发表论文
1.J. Wang, Q. Xu, L. Peng, J. Yang, H. Zhu, J. Zhu, Y. Shi, O. Zakharov, H. Jiang, M. Xu, J. Liu, and S. Liu, "Snapshot Fourier ellipsometry: pushing to sub-nanometer accuracy for high-throughput thin film metrology,"Adv. Sci. Instrum.1, 100008 (2026).
2.S. Guo, H. Chen, C. Mu, K. Su, S. Zhang, H. Jiang, D. H. Wei, and S. Liu, "High-accuracy vectorial Hopkins lithography modeling with full incident-angle Mask3D awareness,"Photon. Res.14. 707-720 (2026).
3.X. Zhao, X. Huang, D. Qiu, Z. Dong, L. Nie, J. Wang, J. Zhu, and S. Liu, "Snapshot Compressive Focus Variation Microscopy for High-Speed Topographic Optical Imaging,"IEEE Photon. Tech. Lett.38, 711-714 (2026).
4.S. Liu, X. Chen, and S. Liu, "Tensorized Quantum Genetic Algorithm With Selective Evolution Strategy for Thin-Film Optical Inverse Problems,"Laser Photon. Rev.(2026).
5.Z. Zhang, X. Feng, H. Jiang, J. Wang, Z. Dong, L. Nie, J. Zhu, and S. Liu, "Wavefront-driven optimization for high-quality hologram generation,"Opt. Lasers Eng.201, 109634 (2026).
6.L. Liu, H. Chen, B. Zhuang, J. Du, J. Liu, H. Gu, and S. Liu, "Regularized subgradient projection solver for ptychographic microscope,"Measurement263, 120214 (2026).
7.J. Zhang, X. Chen, D. Deng, H. Zhong, and S. Liu, "Small angle X-ray scattering measurement of nano-patterns with programmed line roughness,"Measurement263, 120158 (2026).
8.D. Deng, X. Chen, J. Zhang, H. Zhong, W. Zhou, and S. Liu, "Fast calculation method for small-angle X-ray scattering spectra of high-aspect-ratio nanostructures,"J. Appl. Cryst.59, 49-58 (2026).
9.J. Liu, Z. C. Feng, Y. Liu, M. T. Nafisa, Q. Li, C. Zhang, R.-H. Horng, D.-S. Wuu, J. Yiin, L. Wan, H.-H. Lin, B. Klein, I. T. Ferguson, and S. Liu, "Influences of Zn flow rate and temperature on the defect state-related photoelectronic properties of MOCVD-grown ZnGa2O4",Results Eng.29, 108511 (2026).
10.Z. Xu, C Lei, Z. Zhang, Z. Liu, Z. Tang, S. Jiang, X. Chen, and S. Liu, "Asymmetric Field Emission Behavior between Top and Bottom Surfaces of Buckypapers Prepared by Vacuum Filtration,"ACS Appl. Nano Mater.8, 24528-24535 (2025).
11.L. Liu, J. Du, B. Zhuang, M. Gong, J. Liu, H. Gu, and S. Liu, "Pushing the resolution limit of coherent diffractive imaging,"Light Sci. Appl.14, 298 (2025).
12.X. Zhao, M. Li, J. Wang, Z. Dong, L. Nie, H. Deng, J. Zhu, and S. Liu, "Deep feature-fusion snapshot compression microscopy for high-resolution sub-pixel imaging beyond the camera’s frame rate limit,"Optica12, 1469-1477 (2025).
13.S. Guo, H. Chen, C. Mu, S. Zhang, H. Jiang, D. H. Wei, Y. Sun, and S. Liu, "Mask3D-compatible full-vectorial Hopkins imaging for lithographic modeling,"Optica12, 924-934 (2025).
14.S. Liu, X. Chen, and S. Liu, "Physics-enhanced learning for automated determination of material optical constants,"Laser Photon. Rev.19, e00809 (2025).
15.J. Zhang, R. Zhou, N. X. Fang, W. Deng, J. Zhu, and S. Liu, "Experimental Demonstration of Conjugate Structured Illumination Microscopy (c-SIM) for Sensing Deep Subwavelength Perturbations in Background Nanopatterns,"ACS Photon.12, 2710-2719 (2025).
16.J. Liu, J. Zhu, Z. Yu, X. Feng, Z. Li, L. Zhong, J. Zhang, H. Gu, X. Chen, H. Jiang, and S. Liu, "Quasi-visualizable detection of deep sub-wavelength defects in patterned wafers by breaking the optical form birefringence,"Int. J. Extrem. Manuf.7, 015601 (2025).
17.Z. Guo, J. Sun, J. Zhou, H. Gu, and S. Liu, "Tunable optical anisotropy and multiplied-enhancement birefringence of α-MoO3under in-plane strain by first-principles calculations,"Appl. Surf. Sci.685, 162059 (2025).
18.T. Jia, J. Wang, L. Peng, W. Guo, W. Sun, and S. Liu, "Angle-resolved ellipsometric analysis of polishing-induced subsurface damages in calcium fluoride crystals for ultra-precision manufacturing,"Appl. Surf. Sci.696, 162997 (2025).
19.Q. Zhang, H. Gu, Z. Guo, and S. Liu, "Temperature-induced evolutions in critical point optical transitions in HfS2investigated by spectroscopic ellipsometry,"Appl. Surf. Sci. Adv.27, 100763 (2025).
20.W. Zhou, X. Chen, J. Zhang, S. Liu, D. Deng, S. Yang, Z. Tang, and S. Liu, "Deep-learning-powered desmearing for small-angle scattering,"J. Appl. Cryst.58, 504-512 (2025).
21.Z. Wang, J. Min, Y. Sun, X. Wang, X. Chen, Z. Tang, and S. Liu, "Temperature dependence of femtosecond photoacoustic process in high-precision characterization for metal nanofilms,"Photoacoustics41, 100678 (2025).
22.B. Zhuang, L. Liu, J. Du, L. Zhong, H. Liang, M. Gong, Q. Zhang, H. Gu, and S. Liu, "Autofocused Ptychographic Imaging based on Mid-frequency Discrete Cosine Transform,"IEEE Trans. Comput. Imaging11, 1644-1653 (2025).
23.C. Chen, Y. Zhou, Y. Wang, H. Xia, H. Gu, and S. Liu, "Enhancing Monochromatization for Broadband Coherent Diffractive Imaging,"IEEE Trans. Instrum. Meas.74, 5038509 (2025).
24.C. Guo, J. Liu, H. Gu, J. Zhu, C. Zhang, X. Chen, H. Jiang, and S. Liu, "Ensemble Learning-Fused Solution to the Inverse Problem in Integrated Optical Critical Dimension Metrology,"IEEE Trans. Instrum. Meas.74, 1001115 (2025).
25.L. Liu, B. Zhuang, J. Du, L. Zhong, M. Gong, H. Chen, Q. Zhang, J. Liu, H. Gu, and S. Liu, "Wavelet-domain autofocusing algorithm for lensless ptychographic imaging,"Measurement253, 117634 (2025).
26.C. Mu, L. Cheng, Z. Song, S. Guo, K. Li, S. Zhang, H. Jiang, D. H. Wei, J. Zhu, and S. Liu, "Surrogate-assisted genetic algorithm for efficient resist calibration,"Front. Mech. Eng.20, 34 (2025).
27.M. Shao, H. Guo, T. Shi, Q. Xia, and S. Liu, "Minimum width control in topology optimization of lattice structure through a M-VCUT level set based substructure,"Front. Mech. Eng.20, 33 (2025).
28.C. Mu, Z. Song, L. Cheng, S. Guo, K. Li, S. Zhang, H. Jiang, D. H. Wei, Y. Sun, J. Zhu, and S. Liu, "Efficient resist modeling and calibration using a Wiener-Padé formulation and convex optimizations,"Opt. Laser Technol.189, 113022 (2025). (https://doi.org/10.1016/j.optlastec.2025.113022)
29.C. Mu, L. Cheng, S. Zhang, H. Jiang, D. H. Wei, Y. Sun, J. Zhu, and S. Liu, "Efficient nonlinear resist modeling by combining and cascading quadratic Wiener systems,"Opt. Laser Technol.183, 112315 (2025).
30.M. Gong, L. Liu, N. LI, Q. Zhang, J. Liu, H. Gu, and S. Liu, "Ptychographic Mueller matrix imaging (PMMI): in-situ system calibration and evaluation,"Opt. Lett.50, 6137-6140 (2025).
31.W. Chen, X. Chen, Y. Wang, S. Yang, H. Yue, J. Hu, and S. Liu, "Extended eigenvalue calibration method for Mueller matrix polarimetry with four photoelastic modulators,"Opt. Lett.50, 840-843 (2025).
32.S. Liu, X. Chen, and S. Liu, "TFSolver: a numerical Python toolkit for parallel electromagnetic calculation of planar multilayer thin films at multi-wavelength and multi-angle,"Opt. Express33, 52061-52074 (2025).
33.L. Chen, H. Gu, X. Guo, M. Xu, T. Shi, J. Li, W. Cao, and S. Liu, "Simultaneously improving color purity, stability, and health-friendliness of OLEDs via optimally designed color filters,"Opt. Express33, 13506-13518 (2025).
34.P. He, J. Liu, H. Gu, H. Jiang, and S. Liu, "Modified Born series with virtual absorbing boundary enabling large-scale electromagnetic simulation,"Commun. Phys.7, 383 (2024).
35.C. Chen, H. Gu, and S. Liu, "Ultra-broadband diffractive imaging with unknown probe spectrum,"Light Sci. Appl.13, 213 (2024).
36.C. Chen, H. Gu, and S. Liu, "Ultra-simplified diffraction-based computational spectrometer,"Light Sci. Appl.13, 9 (2024).
37.Z. Guo, H. Gu, Y. Yu, Q. Zhang, Z. Wei, and S. Liu, "Wavelength-Linearly-Dependent and Polarization-Sensitive Perfect Absorbers based on Optically Anisotropic Germanium Selenide (GeSe),"Adv. Opt. Mater.12, 2303138 (2024).
38.L. Huang, H. Gu, M. Fang, and S. Liu, "Substrate-tuned dielectric screening effect on optical properties of monolayer MoSe2,"Appl. Surf. Sci.644, 158748 (2024).
39.J. Liu, Z. Zhou, H. Gu, J. Zhu, H. Jiang, and S. Liu, "Asymmetric optical properties and bandgap shift of prestrained flexible ZnO films,"APL Mater.12, 041126 (2024).
40.T. Yang, X. Chen, S. Liu, J. Zhang, and S. Liu, "Bootstrap Method for Uncertainty Evaluation in Critical Dimension Small-Angle X-ray Scattering,"IEEE Trans. Instrum. Meas.73, 1008010 (2024).
41.L. Liu, L. Zhong, M. Gong, J. Du, H. Gu, and S. Liu, "An Efficient and Robust Self-calibration Algorithm for Translation Position Errors in Ptychography,"IEEE Trans. Instrum. Meas.73, 4503712 (2024).
42.L. Liu, W. Li, M. Gong, L. Zhong, H. Gu, and S. Liu, "Resolution-Enhanced Lensless Ptychographic Microscope Based on Maximum-Likelihood High-Dynamic-Range Image Fusion,"IEEE Trans. Instrum. Meas.73, 4502711 (2024).
43.S. Yang, X. Chen, W. Chen, J. Hu, Y. Wang, S. Liu, and S. Liu, "Channeled spectroscopic ellipsometry enabled by physics-informed tandem untrained neural networks,"Measurement235, 114940 (2024).
44.Z. Wang, J. Min, J. Hu, Z. Wang, X. Chen, Z. Tang, and S. Liu, "Femtosecond laser-acoustic modeling and simulation for AlCu nanofilm nondestructive testing,"Front. Mech. Eng.19, 33 (2024).
45.Y. Feng, J. Liu, Z. Song, J. Hao, and S. Liu, "Efficient measurement and optical proximity correction modeling to catch lithography pattern shift issues of arbitrarily distributed hole layer,"Front. Mech. Eng.19, 24 (2024).
46.C. Chen, H. Gu, and S. Liu, "Noise-robust ptychography using dynamic sigmoid-remolding,"Opt. Laser Technol.172, 110510 (2024).
47.J. Zhang, Z. Liu, W. Zhou, D. Deng, X. Chen, and S. Liu, "Virtual X-ray critical dimension metrology via Monte Carlo simulation,"Opt. Lett.49, 6569-6572 (2024).
48.M. Gong, L. Liu, J. Du, B. Zhuang, J. Liu, H. Gu, and S. Liu, "Ptychographic Mueller matrix imaging (PMMI): principle and proof-of-concept demonstration,"Opt. Lett.49, 6409-6412 (2024).
49.S. Guo, L. Cheng, H. Jiang, X. Ke, S. Zhang, D. H. Wei, Y. Sun, and S. Liu, "Symmetry-preserving modeling for lithographic imaging,"Opt. Lett.49, 4038-4041 (2024).
50.S. Liu, X. Chen, T. Yang, J. Zhang, and S. Liu, "Inverse optical scatterometry using sketch guided deep learning,"Opt. Express32, 20303-20315 (2024).
51.P. He, J. Liu, H. Gu, H. Jiang, and S. Liu, "Linearized EUV mask optimization based on adjoint method,"Opt. Express32, 8415-8424 (2024).
52.J. Hu, X. Chen, W. Chen, S. Yang, Y. Wang, Z. Tang, and S. Liu, "Frequency properties of channeled spectropolarimetry: an information theory perspective,"Opt. Express32, 3735-3750 (2024).
完整论文列表，详见：https://pirc.hust.edu.cn/lwfb1.htm
